Excellent measurement results are achieved with our SurfaceSens™ technology. Learn more about our extensive application expertise in surface metrology.
Device manufacturing complexity now includes 2.5D and 3D stacks. With our technology, we create the flexibility you need in heterogeneous design and production cycles.Learn More
Semiconductor and MEMS
Surface measurement on wafers requires a high degree of precision. FRT Metrology tools measure and handle numerous wafer types up to 12 inches for both front and back end, even wafers with Micro-Electronic-Mechanical components.Learn More
Medical and Biotechnology
The durability and safety of these products are often used as quality factors. Our optical systems measure roughness, film thickness, step height and many other parameters.Learn More
Automotive and Other Industrial Manufacturing
Automotive and other industries are passing through disruptive times. Requirements on process control and product quality are becoming more and more intensive.Learn More