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Fully automated wafer metrology tools combine the capabilities of a full-featured 300 mm metrology station with a wafer handling system within an Equipment Front End Module (EFEM). With fully SEMI-compliant metrology solutions and robust hardware components, the MicroProf with EFEM is configurable for any front end high-volume fab, for a wide range of applications in the silicon wafer foundry, applications at different 3D packaging process steps, or comprehensive inspection applications.