Pressure Probe Module
Patended testing with pressure stimulation at wafer-level
Pressure Probe Module Overview
The Pressure Probe Module (PPM) is the perfect tool for testing all kinds of pressure sensors from piezo-resistive to capacitive and absolute or differential. The PPM tests all sensors from atmospheric pressure up to 7 bar.
The pressure is applied to the DUT by an impact pressure principle. A nozzle is positioned directly over the membrane by using the integrated manual x-y positioner. By maintaining a constant gap between nozzle and DUT, repeatability of the applied pressure is guaranteed. Absolute accuracy is ensured using a special calibration procedure.
Due to the modular concept with custom-designed nozzles, dedicated chuck add-ons and much more, it can be added to all Cascade Microtech probe stations. This makes the PPM ideal for R&D platforms as well as production test systems. Existing Cascade Microtech probe stations can be upgraded with the module.
Pressure Probe Module Key Features
- Test pressure sensors from atmospheric up to 7 bar relative pressure
- Works with all kinds of sensor layouts
- Can be adapted to all Cascade probe systems
- Easy-to-use control software
- Highly accurate pressure control with unique calibration procedure