Modular optical metrology set-up for hybrid surface process control
FormFactor's FRT Metrology engineers designed SurfaceSens technology to achieve superior information about the measured sample and greater insights about product quality. All of our FRT MicroProf® metrology tools can be configured with complementary sensor technologies. In a hybrid analysis process, otherwise inaccessible surface data of wafers or other samples are precisely measured.
SurfaceSens offers you the possibility to combine unique metrology and inspection measuring principles in one single tool and thus allows maximum flexibility. The set-up, even for top and bottom sample measurement, with various optical sensors, like point, line and field of view sensors facilitates versatile results about several surface parameters, such as topography, roughness, TTV bow and warp, flatness, coplanarity, sample and layer thickness, and many others.
Retrofitting sensors opens further options for flexible adaptation to future measuring tasks, such as individual and exchangeable sample holders. You can solve your measurement tasks quickly, efficiently, and reliably - with FRT MicroProf plus SurfaceSens.
Our CWL is a fast optical point sensor which works based on the principle of chromatic distance measurement. The CWL's non-destructive method works equally reliably on highly reflective and low-reflective surfaces. For applications where high measuring speeds are required, the SLS, as a fast optical line sensor, offers the optimum solution. Like the CWL, it works according to the principle of chromatic distance measurement. Instead of a single measuring spot, this sensor images 192 measuring spots that are equidistantly aligned along a line. The scanning of a sample is thus made possible in a fraction of the time usually required for point sensors.
The measuring principle used in the confocal microscope (CFM) is a non-contact measuring method for very fast and high-resolution 3D measurement of small structures. Thanks to the confocal measuring method which works on an area basis, meaningful results are available in a few seconds.
The white light interferometer (WLI) is an optical 3D surface sensor based on the white light interferometry method. It is characterized by fast, flat topography measurements with excellent height resolution in the sub-nanometer range.
Also optical film thickness sensors with interferometric or reflectometric methods can be used, so that the film thickness can be determined non-destructively from a few millimeters to less than one nanometer. The thin film sensor FTR can be used to measure the thickness of transparent thin films and layer stacks. The FTR thin-film sensor is based on spectrally resolved reflection measurement and sophisticated evaluation software. For materials that are opaque to visible light but transparent to infrared light, FRT makes thickness measurement possible with IRT. The IRT is an interferometric film thickness sensor with an infrared light source that has been specially developed for measuring the thickness of materials that are transparent to near infrared light.
If the high spatial resolution of the optical sensor is not sufficient, an atomic force microscope (AFM) can be integrated. The AFM allows topography measurements with sub-nm resolution. We also offer an AFM that can be mounted on your light microscope like a normal objective lens to extend the resolution and measurement capabilities of your instrument.