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  • Cascade PLV50 150 mm Vacuum Probe Station
  • Cascade PLV50 Manual Vacuum Probe Station
  • Cascade PLV50 Vacuum Probe System With MEMS Analyzer
  • 150 mm Vacuum Probe Station - Precise Probe Positioning Inside Vacuum Chamber
  • PLV50 Vacuum Probe Station - Wafer Carrier

Entry-level, manual wafer probing in a vacuum environment

The PLV50 is a highly-precise, cost-effective probe station for wafers and substrates up to 150 mm in a vacuum environment < 1×10-5 mbar. Specially designed for laboratory requirements, it supports a wide range of applications, including DC and RF measurements, MEMS and optoelectronic tests.

150 mm Vacuum Probe Station - Precise Probe Positioning Inside Vacuum Chamber


  • Different substrate carriers for wafers up to 150 mm or single dies
  • Up to six positioners
  • Optional thermal chuck (-60°C to 300°C) and pressure regulation
  • Probing with an open chamber lid possible under atmospheric condition
  • Specially designed for laboratory environments
  • Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)

Manual Vacuum/Cryogenic Probe Station - Precise Positioning on Single Die


  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Precise probe positioning
  • Excellent measurement accuracy and repeatability
  • Superior vibration attenuation

PLV50 Probe Station - Ergonomic and Straightforward Design

Ease of use

  • Ergonomic and straightforward design
  • Intuitive, manual operation
  • Simple microscope operation
  • Hinged topside lid
  • Comfortable and easy operation
  • Quick and ergonomic change of DUT
  • Topside access to probes and samples

PLV50 Vacuum Probe Station - Independent Control of Linear Chuck Stage and Positioners

High measurement throughput

  • Independent control of linear chuck stage and positioners
  • Contact/separation stroke for probe platen
  • Fast, manual step-and-repeat testing of the whole wafer
  • Simultaneous contacting and separation of all probes

  • IV/CV
  • MEMS
  • Opto
  • RF/mmW/THz

SourceOne – Certified Pre-Owned Equipment

You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.

SourceOne – Factory Refurbishment Program

Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.

SourceOne – Trade In / Buy Back Program

We'll take your probe station back for a credit note.