High Voltage Probe Overview
High-power probes from FormFactor provide a complete on-wafer solution for over-temperature, low-contact
resistance measurements of power semiconductors. Together with Tesla series on-wafer power device characterization system,
FormFactor’s high-power probes achieve reliable and repeatable on-wafer measurements up to 300 A and 10,000 V
High Voltage Probe Key Features
- Coaxial and triaxial measurements up to 3,000 V
- High-quality construction with low-noise electrical performance
- Replaceable probe tips in a variety of tip sizes
- Temperature range of -55 to 300ºC
- Triaxial measurement ensures a much better understanding of device leakage in the off state
- Highly reliable, stable and repeatable measurements
- Integrally designed as part of a complete measurement solution
Videos

TESLA200 - 200mm High Power Probe System
The TESLA200 Advanced On-Wafer Power Semiconductor Probe System is an integrated high-power test solution that enables collection of accurate high voltage and high current measurement data, with complete operator safety.