eVue Microscope Overview
Experience the future of digital imaging
The eVue IV digital imaging system combines extraordinary optical performance with increased productivity.
It’s revolutionary multi-lens design provides the perfect balance between optical resolution, digital zoom and live motion video. The system enables to navigate, observe and measure devices faster and smarter than ever before, supporting FormFactor’s unique Contact Intelligence™.
The new high-speed focus system allows faster operation, providing highly accurate measurement data in the shortest time. The advanced intelligent lens mount detects involuntary mechanical contact and enhances automation safety.
The eVue IV digital microscope is the perfect addition to your Cascade Probe Station.
eVue Microscope Key Features

Multi Lens Design
- Quick and easy probe tip navigation
- Maximizes field of view
- High magnification

Longer Focus Range
- Z drive can work in the same range as the chuck
- Enables higher separation gap while the DUT stays in focus
- Makes the unique ScopeFollowMode even more powerful
- Enables a faster and more accurate probe tip placement
- Shadow-free view of the corresponding features

Intelligent Objective Lens Mount
- Automatically configure and optimize performance
- Easy lens exchange
- eVue identifies objective parameters automatically and communicates them to Velox™ Probe Station Control Software

Extended Lifetime
- 24/7 operating
- Increased MTBF
- No internal maintenance required

Intelligent Collision Detection System
- Protects the measurement setup
- Prevents involuntary mechanical contact between lens and probes
- Enhances automation safety
Videos

eVue IV Microscope
The eVue IV digital imaging system combines extraordinary optical performance with increased productivity.

SourceOne – Certified Pre-Owned Equipment
You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.

SourceOne – Factory Refurbishment Program
Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.

SourceOne – Trade In / Buy Back Program
We'll take your probe station back for a credit note.