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Integrated Measurement Systems

FormFactor’s IMS products deliver robust, turn-key functionality, peace of mind, and a faster path to collecting high-quality on-wafer measurement data for today’s important and challenging test applications. Integrated Measurement Systems unite instruments and other products from FormFactor’s partners, including Keysight Technologies, along with FormFactor’s probe systems, probes, and everything else needed to deliver critical data for devices and integrated circuits on the wafer.

Wafer/Multi-chip Cryogenic Systems

Our high-performance cryogenic probe stations for on-wafer and multi-chip measurements support a wide range of challenging applications, including IR-sensor test, radiometric test, DC and RF measurements at cryogenic temperatures. The systems can handle wafers up to 300 mm, and support cold filter, cold shutter and selectable f/value aperture as well as multiple optical instruments like IR radiation sources (black bodies). Up to eight probe positioners and/or a probe card can be integrated. Automatic chip alignment, OCR and wafer mark reading are exclusive features of our fully- and semi-automated systems. Cooling options include liquid helium (LHe), liquid nitrogen (LN2) or cryogen-free cooling. With a large install base of >80 stations worldwide, we bring expertise and technical know-how to provide the right solution for your measurement challenge.

Wafer/Multi-chip Cryogenic Systems

Our wafer/multi-chip probe systems for Quantum Cryogenics include high precision, fully-automated probe stations for 150 mm and 200 mm substrates in a 4 K environment. FormFactor’s longstanding probing expertise and decades of precision cryogenic experience come together in these systems to take superconducting device test and measurement out of the lab into the fab.

Chip-scale Cryogenic Systems

The HPD Cryogenic Chip-scale Probe Stations tackle problems like long turnaround times, high noise, and low signal capabilities. By employing world class technology and superior cryogenic probing knowledge, these systems enable accurate measurements at cryogenic temperatures.

Dilution Refrigerators

FormFactor’s JDry cryogen-free dilution refrigerators enable easy and cost-effective cooling to temperatures below 10 mK. The JDry models have been optimized for quantum computing applications and can accommodate up to 270 semirigid cables. General-purpose configurations and astronomy/detector cooling are also provided.

He3 Cryostats

Helium-3 cryostats are well-suited for STM, NMR, ARPES, and a wide variety of other sub-Kelvin applications. He-3 cryostats can be top- or bottom-loading, configured for “wet” or “dry” (cryogen-free) operation, and with samples in ultra high vacuum, liquid, gas, and magnetic fields.