Cascade
MPS150
150 mm modular probe station starting at $13,880
MPS150 Overview
Customize your 150 mm probe station based on flexible modules at an incredible price!
FormFactor introduces a new modular concept for its best-in-class 150 mm probe stations. This will make it even easier to configure your individual probe solution for current and future needs at an incredible price. Simply choose a base station and add as many application-specific starter kits as you need.
Available Options
Microscope
- Stereo Zoom Microscope
- High Resolution Microscope
Application Starter Kit (incl. Probes)
- IV/CV
- RF Basic
- mmW Basic
- Keysight N5291 (Advanced mmW)
- VDI Mini Extenders (Advanced mmW)
- Focus Microwaves Delta Tuners (Advanced Load-pull)
- Advanced THz
- Failure Analyis
- High Power
Positioner Kit
- Basic
- Advanced mmW / THz / Load-pull
Chuck
- Coax
- Triax
- RF
- Thermal
- High Power
Base Station
- Basic
- Advanced mmW / THz / Load-pull
Example: Complete 150 mm Entry-level IV/CV Manual Probe Station
Additional Configuration Examples
Coax – DC parametric test down to pA levels
- Movable platen with 40 mm height adjustment, 200 μm contact / separation stroke and ± 1 μm repeatability
- Chuck stage with adjustable friction & stage lock, unique Z chuck adjustment and 90 mm pull-out
- Magnetic positioners with 1 μm feature resolution and 3 linear axes with precision ball bearing
Triax – Low-noise measurements down to fA levels
- Stereo microscope: 15x–100x magnification with large field-of-view and camera-ready c-mount
- Four triax probe arms and high-quality triax cables
- Light/EMI shielding (optional)
- Upgrade option for fF-level measurements
- TRIAX chuck with ±8 fine theta chuck rotation, three auxiliary areas, chuck surface with ±5 μm planarity for consistent contact force and overtravel
- East/West to North/South measurements with single setup
RF test up to 67 GHz
- Three probe technologies available: Infinity Probe, ACP Probe, |Z| Probe
- Matching cables and substrates included
- RF chuck ±3 μm surface planarity
- Unique 200 μm platen contact/ separation stroke with ≤± 1 μm accuracy for repeatable contact
- WinCal XE Calibration Software
mmW - 70 GHz through sub-THz and load-pull
- SlimVue microscope with quick lens exchange, 1 μm opitcal resolution, resolving ‹50 μm pads
- Engraved guides on mmW platen for application-specific SIGMA Kits
- Supports broadband, load pull, coax RF and banded waveguide configuration
- Optical feedback on platen position (gauge)
- Vibration Isolation Platform
mmW probing up to THz and load-pull
- SlimVue microscope with quick lens exchange, 1 μm opitcal resolution, resolving ‹50 μm pads
- Engraved guides on mmW platen for application-specific SIGMA Kits
- Supports broadband, load pull, coax RF and banded waveguide configuration
- Optical feedback on platen position (gauge)
- Rock-solid mechanical design and vibration isolation platform
- Submicron stage accuracy
- Motorized positioners
- <+-1 μm separation repeatability
- Micrometer-accuracy and repeatable probe placement and over travel
Failure analysis and design debug
- Stable microscope bridge design and XY microscope with up to 4000x magnification (option)
- Laser cutter and camera ready
- Contact submicron features
- Simultaneous use of probe card and single needles (option)
- Chuck ready for single DUT
- Quickest transition from wafer-to-chip-to-package
- Vacuum positioners with 1 μm feature resolution
- DPP450 positioner with nanometer resolution and accuracy (option)
On-wafer power device characterization
- Multi-purpose SIGMA instrument integration kit
- Triax probe with protected guard
- Seamless integration of various analyzers
- Triax chuck with surface coating for low-leakage measurements up to 3 kV, high-isolation ready
- High-current measurements up to 100 A with lowest contact resistance
- Optional upgrade for 10 kV (coax) operating voltage
- Thin wafer handling capability
- Arcing protection and advanced grounding concept
- Shield Enclosure with interlock for EMI/light-tight environment
- Maximum protection from high-voltage shock for users and devices
MPS150 Key Features
Flexibility
- Ideal for a wide range of applications such as RF, mm-Wave and sub-THz characterization, FA, DWC, MEMS, optoelectronic tests and WL
- Re-configurable and upgradable as requirements grow
- Minimizes setup times with no loss in performance or accuracy
- Seamless integration of various measurement instruments
Stability
- Solid station frame
- Built-in vibration-isolation solution for superior vibration attenuation
- Rigid microscope bridge
- Compact and rigid mechanical design
- Highly accurate measurement results
- Incorporates best-known methods
Ease of Use
- Ergonomic and straightforward design for comfortable and easy operation
- Low-profile design
- Simple microscope operation
- Quick and ergonomic change of DUT through pull-out stage
- Minimize training efforts
- Fast time to data
- Convenient operation
Videos
Flexible Cascade MPS150 Modular 150mm Probe Station
The MPS150 is an easy to use, yet highly-precise manual probe platform for wafers and substrates up to 150 mm. Pre-configured application-focused probing solutions are available with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The MPS150 is the industry’s probe platform of choice.
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EPS150 Installation Overview
This video shows the quick and easy installation of the EPS150 packages EPS150COAX, EPS150COAXPLUS, EPS150TRIAX and EPS150RF with boom-stand and Motic stereo microscope. The tutorial guides through the different installation steps and demonstrates fine adjustment capabilities.