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  • 200 mm Vacuum Probe Station with IR Sources
  • PAP200 - 200 mm Vacuum & Pressure Probe Station
  • Solid Station Frame for Vacuum/Cryogenic Probing
  • Front Loading Capability for Vacuum / Cryogenic Probing

Semi-Automated Wafer Probing in a High Vacuum or Overpressure Environment

The PAP200 is a highly-precise semi-automated probing solution for wafers and substrates up to 200 mm in a vacuum environment down to < 1×10-5 mbar or in an overpressure environment up to 4.0 bar (abs.). Designed for industrial environments and major research facilities, it supports MEMS tests and a wide range of other applications.

The PAP200 supports multiple optical instruments like IR radiation sources (black bodies). Up to eight probe positioners and/or a probe card can be integrated.

PAP200 - 200 mm Vacuum & Pressure Probe Station


  • Different substrate carriers for wafers up to 200 mm or single dies
  • Probe cards and/or up to eight positioners
  • Optional thermal chuck (-60°C to 300°C) and pressure regulation
  • Accessories available, such as black bodies and optical motion analysis tools
  • Optional upgrade for 300 mm wafer
  • Designed for industrial environments
  • Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
  • Ideal for small structures

Solid Station Frame for Vacuum/Cryogenic Probing


  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Optional microscope bridge
  • Precise probe positioning
  • Excellent measurement accuracy and repeatability
  • Superior vibration attenuation
  • Stable image quality for demanding MEMS analysis

Front Loading Capability for Vacuum / Cryogenic Probing

Ease of use

  • Joystick controller
  • Manual probe positioners with rotary feed-throughs
  • Front loading capability through load door
  • Comfortable and easy operation
  • Quick and ergonomic change of DUT

High Measurement Throughput for Vacuum / Cryogenic Probing

High measurement throughput

  • Software control of chuck for fast step-and-repeat testing of the entire wafer
  • Fast step-and-repeat testing of the whole wafer

Velox Probe Station Control Software

Velox Probe Station Control Software

  • User-centered design minimizes training costs and enhances efficiency
  • Comprehensive alignment functions – from simple wafer alignment and mapping to automated alignment and test of multiple singulated chips, like IR – Focal Plane Arrays
  • Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
  • VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle

  • IV/CV
  • MEMS
  • Opto
  • RF/mmW/THz

SourceOne – Certified Pre-Owned Equipment

You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.


SourceOne – Factory Refurbishment Program

Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.


SourceOne – Trade In / Buy Back Program

We'll take your probe station back for a credit note.