TESLA200 - manual device characterization system

Cascade

T200

200 mm semi-automated on-wafer power device characterization system

T200 Overview

The Tesla T200 semi-automatic power device characterization system provides a complete on-wafer solution for over-temperature, low-contact resistance measurements of power semiconductors up to 3,000 V (triax)/10,000 V (coax) and 200 A (pulsed)/10 A (DC)., while providing a low-noise, fully guarded and shielded test environment, as well as a certified safety interlock system integrated with an ergonomic clear enclosure or infrared laser light curtain.

Applications: High Power

T200 Key Features

Seamless Integration

Convenient instrument connection kits
Seamless integration between Velox and analyzers/measurement software
Easy and safe system integration with Keysight and Keithley power device analyzers

MicroVac™ Chuck

495 Uniformly distributed vacuum micro-holes
Gold-plated high power chuck surface
Thin-wafer handling capability
Low electrical and thermal contact resistance across the entire wafer, ensuring accurate measurement results and effective heat dissipation
Prevents thin wafers from curling and breaking

Safety

Regulatory-certified probing environment
Safety interlock system with clear enclosure or light curtain
Fully guarded and shielded test environment
Operator safety during measurements
Protects device and instrumentation from high voltage discharge

Ease of Use

Roll-out stage
Full wafer access and easy wafer loading/unloading

Velox Probe Station Control Software

Intuitive GUI
Software joystick for precise, sub-micron positioning
Easy integration with instrument, testers, and test and measurement software
Efficient system utilization by novice and expert users
Prevents damage of probe tips and probe cards throughout the entire measurement cycle
Fast data collection