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  • TESLA200 Manual Device Characterization System

The Tesla T200 semi-automatic power device characterization system provides a complete on-wafer solution for over-temperature, low-contact resistance measurements of power semiconductors up to 3,000 V (triax)/10,000 V (coax) and 200 A (pulsed)/10 A (DC)., while providing a low-noise, fully guarded and shielded test environment, as well as a certified safety interlock system integrated with an ergonomic clear enclosure or infrared laser light curtain.

TESLA Instrument Connection Kits

Seamless Integration

  • Convenient instrument connection kits
  • Seamless integration between Velox and analyzers/measurement software
  • Easy and safe system integration with Keysight and Keithley power device analyzers

Gold-plated MicroVac Chuck

MicroVac™ Chuck

  • 495 Uniformly distributed vacuum micro-holes
  • Gold-plated high power chuck surface
  • Thin-wafer handling capability
  • Low electrical and thermal contact resistance across the entire wafer, ensuring accurate measurement results and effective heat dissipation
  • Prevents thin wafers from curling and breaking

TESLA200 Safety interlock system

Safety

  • Regulatory-certified probing environment
  • Safety interlock system with clear enclosure or light curtain
  • Fully guarded and shielded test environment
  • Operator safety during measurements
  • Protects device and instrumentation from high voltage discharge

TESLA200 Easy wafer loading/unloading

Ease of Use

  • Roll-out stage
  • Full wafer access and easy wafer loading/unloading

Velox Probe Station Control Software

Velox Probe Station Control Software*

  • User-centered design minimizes training costs and enhances efficiency
  • Windows 10 compatibility enables highest performance and safe operation with state-of-the-art hardware
  • Comprehensive alignment functions – from simple wafer alignment and mapping to advanced probe-to-pad alignment over multiple temperatures for autonomous semiconductor test
  • Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
  • VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle

*Semi-auto version only.

  • High Power

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TESLA - Power Device Characterization System

The Tesla semi-automatic power device characterization system provides a complete on-wafer solution for over-temperature, low-contact resistance measurements of power semiconductors up to 3,000 V (triax)/10,000 V (coax) and 200 A (pulsed)/10 A (DC)., while providing a low-noise, fully guarded and shielded test environment, as well an infrared laser light curtain and safety interlock system.


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SourceOne – Certified Pre-Owned Equipment

You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.

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SourceOne – Factory Refurbishment Program

Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.

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SourceOne – Trade In / Buy Back Program

We'll take your probe station back for a credit note.