T200

Seamless Integration

• Convenient instrument connection kits
• Seamless integration between Velox and analyzers/measurement software
• Easy and safe system integration with Keysight and Keithley power device analyzers

MicroVac™ Chuck

• 495 Uniformly distributed vacuum micro-holes
• Gold-plated high power chuck surface
• Thin-wafer handling capability
• Low electrical and thermal contact resistance across the entire wafer, ensuring accurate measurement results and effective heat dissipation
• Prevents thin wafers from curling and breaking

Safety

• Regulatory-certified probing environment
• Safety interlock system with clear enclosure or light curtain
• Fully guarded and shielded test environment
• Operator safety during measurements
• Protects device and instrumentation from high voltage discharge

Ease of Use

• Roll-out stage
• Full wafer access and easy wafer loading/unloading

Velox Probe Station Control Software*

• User-centered design minimizes training costs and enhances efficiency
• Windows 10 compatibility enables highest performance and safe operation with state-of-the-art hardware
• Comprehensive alignment functions – from simple wafer alignment and mapping to advanced probe-to-pad alignment over multiple temperatures for autonomous semiconductor test
• Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
• VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle

*Semi-auto version only.