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  • EPS150TESLA Manual High Power Probe Station

Energize Your Power Measurements

High-voltage probing solution to test breakdown voltages up to 3,000 volts, and high-current probing up to 40 amps for lowest on-state resistance. A shielded environment reduces noise and provides safe operating conditions.

EPS150TESLA Optimized High Power Measurement Setup

Optimized Measurement Setup

  • Multi-purpose SIGMA instrument integration kit
  • Shorter cabling and universal chuck connection
  • Triax probe with protected guard
  • Optimized signal path
  • Safe probe tip exchange
  • Seamless integration of various analyzers

EPS150TESLA Special high power chuck

High Power Chuck

  • Triax design for low-leakage measurements up to 3 kV
  • Special chuck surface coating
  • High-isolation ready
  • High-current measurement up to 100 A with lowest contact resistance
  • Optional upgrade for 10 kV (coax) operating voltage
  • Thin wafer handling capability

150 mm On-wafer Power Device Characterization System

Safe Operation

  • Arcing protection
  • Shield Enclosure with interlock
  • Advanced grounding concept
  • Maximum protection from high-voltage shock for users and devices
  • Common ground protection for all instruments
  • EMI/light-tight shielded environment

  • High Power

MPS150 Modular Probe Station Starting at $13,880

FormFactor’s MPS150 probe station enables fast and precise manual handling of wafers and substrates up to 150 mm. It is the industry’s probe platform of choice for IV/CV, RF, mm-Wave, Terahertz, Load-Pull, High Power, Failure Analysis and Silicon Photonics measurements.

Flexible Cascade MPS150 Modular 150mm Probe Station

The MPS150 is an easy to use, yet highly-precise manual probe platform for wafers and substrates up to 150 mm. Pre-configured application-focused probing solutions are available with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The MPS150 is the industry’s probe platform of choice.


Recognize Pure Genius in Test and Measurement Innovation

We salute the geniuses who have contributed to the advancement of the semiconductor industry. From the early pioneers to the research labs in today’s universities, see how their contributions have moved the industry forward.


SourceOne – Certified Pre-Owned Equipment

You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.

SourceOne – Factory Refurbishment Program

Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.

SourceOne – Trade In / Buy Back Program

We'll take your probe station back for a credit note.