Cascade
TESLA200 – Manual
200 mm manual on-wafer power device characterization system
TESLA200 - Manual Overview
The Tesla manual power device characterization system provides a complete on-wafer solution for over-temperature, low-contact resistance measurements of power semiconductors up to 3,000 V (triax)/10,000 V (coax) and 200 A (pulsed)/10 A (DC)., while providing a low-noise, fully guarded and shielded test environment, as well as a certified safety interlock system integrated with an ergonomic clear enclosure or infrared laser light curtain.
TESLA200 - Manual Key Features
Seamless Integration
- Convenient instrument connection kits
- Seamless integration between Velox and analyzers/measurement software
- Easy and safe system integration with Keysight and Keithley power device analyzers
MicroVac™ Chuck
- 495 Uniformly distributed vacuum micro-holes
- Gold-plated high power chuck surface
- Thin-wafer handling capability
- Low electrical and thermal contact resistance across the entire wafer, ensuring accurate measurement results and effective heat dissipation
- Prevents thin wafers from curling and breaking
Safety
- Regulatory-certified probing environment
- Safety interlock system with clear enclosure or light curtain
- Fully guarded and shielded test environment
- Operator safety during measurements
- Protects device and instrumentation from high voltage discharge
Ease of Use
- Roll-out stage
- Full wafer access and easy wafer loading/unloading
