TESLA200
200 mm semi-/ fully-automated on-wafer power device characterization system
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200 mm semi-/ fully-automated on-wafer power device characterization system
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Contact Sales TodayDesigned specifically for IGBT/power MOSFET (GaN, SiC, Si) device measurements at the wafer level, the new TESLA200 on-wafer power semiconductor probing system is engineered to provide accurate data up to 3 kV (triaxial) / 10 kV (coaxial) and 200 A (standard) / 600 A (high current). With next generation test capabilities, anti-arcing solutions, wafer automation, and support for both engineering probes and T.I.P.S. “LuPo” High Voltage / High Power Probe Cards, the TESLA200 now enables complete thermal testing (-55°C to 300 °C) with fully-automatic thinned/warped/TAIKO wafer loading. One system covers all on-wafer high power test needs, from R&D to niche production.
The new TESLA200, available in semi-automatic and fully-automatic models, is scalable and field upgradeable, allowing it to meet any budget requirements. The system is ideal for collecting high accuracy measurement data on single or volume wafers as fast as possible, and can be utilized in R&D, device characterization/modelling or niche production applications.
Patented AttoGuard® and MicroChamber® technologies built in TESLA200 significantly improve low-leakage and low-capacitance measurements. In combination with FormFactor’s patented TESLA FemtoGuard™ thermal chuck technology, the TESLA200 provides an ultra-low noise, fully guarded and shielded test environment. The high-power TESLA FemtoGuard chuck also incorporates MicroVac™ technology enabling low-contact resistance, thin-wafer handling and maximum power dissipation.
To ensure the utmost safety during high-voltage measurements, the TESLA200 on-wafer power semiconductor probing system employs a TUV-certified safety interlock system integrated with an ergonomic clear enclosure. With an advanced 200 mm fast stage, automatic wafer loader and thin wafer handling capability, TESLA200 provides everything needed for scientists, R&D / test engineers, or production operators to get their job done fast.
TESLA200 - 200mm High Power Probe System
The TESLA200 Advanced On-Wafer Power Semiconductor Probe System is an integrated high-power test solution that enables collection of accurate high voltage and high current measurement data, with complete operator safety.
eVue IV Microscope
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SourceOne – Certified Pre-Owned Equipment
You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.
SourceOne – Factory Refurbishment Program
Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.
SourceOne – Trade In / Buy Back Program
We'll take your probe station back for a credit note.