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Cascade PAV200 Vacuum Probe Station
  • Cascade PAV200 Vacuum Probe Station
  • 200 mm Vacuum Probe Station with IR Sources
  • Vacuum Probe Positioners Inside the Chamber
  • 200 mm Vacuum / Cryogenic Probe Station - Ergonomic Front Side Loading
  • Semi-automated PAV200 with Different Optical Instrumentation
  • Different Microscope Options for Vacuum/Cryogenic Probing

Semi-automated wafer probing in a high vacuum environment

The PAV200 is a highly-precise semi-automated probe station for wafers and substrates up to 200 mm in a vacuum environment down to < 1×10-4 mbar. Designed for industrial environments and major research facilities, it supports a wide range of applications, including DC and RF measurements, MEMS and optoelectronic tests.

The PAV200 supports multiple optical instruments like IR radiation sources (black bodies). Up to eight probe positioners and/or a probe card can be integrated.

Vacuum Probe Positioners Inside the Chamber

Flexibility

  • Different substrate carriers for wafers up to 200 mm or single dies
  • Probe cards and/or up to eight positioners
  • Optional thermal chuck (-60°C to 300°C) and pressure regulation
  • Accessories available, such as black bodies and optical motion analysis tools
  • Optional upgrade for 300 mm wafer
  • Designed for industrial environments
  • Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
  • Ideal for small structures

Solid Station Frame for Vacuum/Cryogenic Probing

Stability

  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Optional microscope bridge
  • Precise probe positioning
  • Excellent measurement accuracy and repeatability
  • Superior vibration attenuation
  • Stable image quality for demanding MEMS analysis

Front Loading Capability for Vacuum / Cryogenic Probing

Ease of use

  • Joystick controller
  • Manual probe positioners with rotary feed-throughs
  • Front loading capability through load door
  • Comfortable and easy operation
  • Quick and ergonomic change of DUT

High Measurement Throughput for Vacuum / Cryogenic Probing

High measurement throughput

  • Software control of chuck for fast step-and-repeat testing of the entire wafer
  • Fast step-and-repeat testing of the whole wafer

Velox Probe Station Control Software

Velox Probe Station Control Software

  • User-centered design minimizes training costs and enhances efficiency
  • Comprehensive alignment functions – from simple wafer alignment and mapping to automated alignment and test of multiple singulated chips, like IR – Focal Plane Arrays
  • Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
  • VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle

  • IV/CV
  • MEMS
  • Opto
  • RF/mmW/THz