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  • 200 mm Cryogenic Manual Probe Station - Probes Inside the Chamber

The PAC200-auto is a highly-precise fully-automated probe station for wafers and substrates up to 200 mm in a high vacuum environment, at cryogenic temperatures down to 77 K with liquid nitrogen or down to 10 K with liquid helium. Dry-cooling options are also available. Designed for industrial environments and major research facilities, it supports a wide range of applications, including DC and RF measurements of the latest silicon, compound semiconductor and superconductor devices, same as semi-automatic PAC200. The PAC200-auto supports multiple optical instruments like IR radiation sources (black bodies). Up to eight probe positioners and/or a probe card can be integrated.

200 mm Cryogenic Manual Probe Station - Probes Inside the Chamber

Flexibility

  • Different substrate carriers for wafers up to 200 mm or single dies
  • Probe cards and/or up to eight positioners
  • Use with liquid nitrogen or helium, depending on the target temperature. Or use of cryo-cooler for dry-cooling option. 
  • Accessories available, such as black bodies and optical motion analysis tools
  • Designed for industrial environments
  • Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
  • Ideal for small structures

Stability

  • Ice- and condensation-free probing down to 77 K (using liquid nitrogen) or down to 10 K (using liquid helium or or via a dry-cooled solution using cryo-cooler)
  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Optional microscope bridge
  • Precise probe positioning
  • Excellent measurement accuracy and repeatability
  • Superior vibration attenuation
  • Stable image quality for high-resolution microscopes

Ease of Use

  • Joystick controller
  • Manual probe positioners with rotary feed-throughs
  • Automatic loading capability
  • Optional: manual loading through side-load door
  • Comfortable and easy operation
  • Quick and ergonomic change of DUT

Velox Probe Station Control Software

Velox Probe Station Control Software

  • User-centered design minimizes training costs and enhances efficiency
  • Comprehensive alignment functions – from simple wafer alignment and mapping to automated alignment and test of multiple singulated chips, like IR – Focal Plane Arrays
  • Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
  • VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle

  • IV/CV
  • MEMS
  • Opto
  • RF/mmW/THz
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PAC200 Fully-Automated Cryogenic Probe Station with Loader

The PAC200-auto cryogenic probe station with loader enables fully-automated wafer handling in a cryogenic environment. This reduces cool-down and warm-up time, increases throughput and lowers consumption of the used cryogenic liquids. Up to ten wafers (mounted on carriers) can be loaded and tested automatically in one measurement cycle. Carriers with wafers, single dies, or wafer fragments can be used.