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  • PM8 manual probe system
  • EPS200MMW with T-Wave Probes and VDI WR2.2 Extenders for Measurements up to 500 GHz
  • EPS200RF Design

Highly Stable, Ergonomic and Flexible Manual Probe Station

The PM8 is designed to provide a highly stable, ergonomic and flexible probing platform for precise analytical probing applications up to 200 mm, such as device and wafer characterizations, failure analysis (FA), RF/mmW and sub-THz probing, opto-engineering and MEMS.

PM8 mechanics

Superior Mechanics

  • Highly stable granite base
  • Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges
  • 1 µm repeatable separation stroke
  • Excellent measurement accuracy and repeatability
  • Fast navigation and high-precision probe positioning

Flexible EPS200MMW System

High Flexibility

  • Re-configurable for DC, RF, mmW, FA, WLR and more
  • Multiple accessories: Thermal chucks, motorized microscopes and positioners, dark box, and more
  • 40 mm platen height adjustability
  • Upgrade path to meet your future needs
  • Fast transition between wafer and package test

EPS200RF Design

Ease of use

  • Low-profile, straightforward design
  • Easy and ergonomic operation

PM8 Probe Station - Double-side Option

Double-side option

  • Front or backside instrumentation, e.g.: Integrating Sphere, Fiber setup, Pressure Module
  • Front or backside probing capability
  • Access to top side and bottom side of device under test (DUT)
  • Highly accurate light measurement

  • Failure Analysis
  • IV/CV
  • MEMS
  • RF/mmW/THz


1.1 THz Calibration on an EPS200MMW Manual Wafer Probe Station

This video gives an overview of a typical calibration run at 1.1 THz on a Cascade EPS200MMW manual probe station with THz SIGMA Kit. WinCal XE calibration software runs directly on a 67GHz PNA from Keysight Technologies. The frequency extenders are 1.1 THz models from Virginia Diodes and probes are Cascade T-Wave Probes.


SourceOne – Certified Pre-Owned Equipment

You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.


SourceOne – Factory Refurbishment Program

Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.


SourceOne – Trade In / Buy Back Program

We'll take your probe station back for a credit note.