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300 mm Analytical Probe Station
  • 300 mm Analytical Probe Station
  • PM300 manual open probe system
  • PM300 Straightforward design

Precise and Stable 300 mm Probing

The PM300 Analytical Probe Station is the industry benchmark in manual semiconductor failure analysis and in-process testing. The superior mechanics of this versatile probe system deliver a stable and precise system setup regardless of your application.

The PM300 is available as open or shielded system PM300PS.

The PM300PS manual analytical probe system creates a measurement environment free from electromagnetic (EMI) and radio-frequency interference (RFI) for device characterization and modeling, process development, wafer-level reliability, failure analysis and 3D IC engineering test.

High-precision Probe Positioning

Superior Mechanics

  • Highly stable granite base
  • Independent, coarse movement of X and Y axes, combined with easy fine adjustments
  • Excellent measurement accuracy and repeatability
  • Fast navigation and high-precision probe positioning

PM300 - Highly Flexible

High Flexibility

  • Re-configurable for DC, RF, mmW, FA, WLR and more
  • Thermal range of -60°C to +200°C (PM300PS) and +15°C to +300°C (PM300)
  • Multiple accessories: Thermal chucks, motorized microscopes and positioners, dark box, and more
  • 40 mm platen height adjustability
  • Upgrade path to meet your future needs
  • Fast transition between wafer and packaged device test

PM300 Straightforward design

Ease of Use

  • Low-profile, straightforward design
  • Spacious top chambers for up to 12 positioners
  • Easy and ergonomic operation

Fully Electromagnetic Shielding

Shielding

  • Reduces electrical noise by providing a fully electromagnetically shielded, ultra-low-noise, light-tight environment
  • Enables accurate low-noise measurements of atto amperes, femtofarads and microvolts at temperatures down to -60°C
  • Ideal conditions for sensitive applications such as 1/f noise measurements
  • Thermal range of -60°C to +200°C available

  • Failure Analysis
  • IV/CV
  • Reliability
  • RF/mmW/THz