Cascade
PMV200
200 mm manual vacuum probe system
PMV200 Overview
Advanced manual wafer probing in a high vacuum environment
The PMV200 is a highly-precise probe station for wafers and substrates up to 200 mm in a vacuum environment down to < 1×10-5 mbar. Designed for educational and industrial environments, it supports a wide range of applications, including DC and RF measurements, MEMS and optoelectronic tests.
Applications: IV/CV, RF/mmW, Opto, MEMSPMV200 Key Features
Flexibility
- Different substrate carriers for wafers up to 200 mm or single dies
- Probe cards and/or up to eight positioners
- Optional thermal chuck (-60°C to 300°C) and pressure regulation
- Accessories available, such as black bodies and optical motion analysis tools
- Optional upgrade for 300 mm wafer
- Designed for industrial environments
- Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
- Ideal for small structures
Stability
- Probe positioners placed inside vacuum chamber
- Short and stable probe arms
- Solid station frame with built-in vibration-isolation
- Optional microscope bridge
- Precise probe positioning
- Excellent measurement accuracy and repeatability
- Superior vibration attenuation
- Stable image quality for demanding MEMS analysis
Ease of use
- Intuitive, manual drives
- Front loading capability through load door
- Comfortable and easy operation
- Quick and ergonomic change of DUT
High measurement throughput
- Software control of chuck for fast step-and-repeat testing of the entire wafer
- Fast step-and-repeat testing of the whole wafer
