Contact Us
Learn About Our Educational Savings Program Explore Our Certified Used Equipment Connect to an Expert

Looking for customer support? Ready to learn more about our products and services?

Contact Sales Today
  • Cascade PMV200 Vacuum Probe Station
  • 200 mm Vacuum Probe Station with IR Sources
  • Vacuum Probe Positioners Inside the Chamber
  • Different Microscope Options for Vacuum/Cryogenic Probing
  • Solid Station Frame for Vacuum/Cryogenic Probing
  • Manual Controls of Chuck for Vacuum/Cryogenic Probing

Advanced manual wafer probing in a high vacuum environment

The PMV200 is a highly-precise probe station for wafers and substrates up to 200 mm in a vacuum environment down to < 1×10-4 mbar. Designed for educational and industrial environments, it supports a wide range of applications, including DC and RF measurements, MEMS and optoelectronic tests.

Vacuum Probe Positioners Inside the Chamber


  • Different substrate carriers for wafers up to 200 mm or single dies
  • Probe cards and/or up to eight positioners
  • Optional thermal chuck (-60°C to 300°C) and pressure regulation
  • Accessories available, such as black bodies and optical motion analysis tools
  • Optional upgrade for 300 mm wafer
  • Designed for industrial environments
  • Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
  • Ideal for small structures

Solid Station Frame for Vacuum/Cryogenic Probing


  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Optional microscope bridge
  • Precise probe positioning
  • Excellent measurement accuracy and repeatability
  • Superior vibration attenuation
  • Stable image quality for demanding MEMS analysis

Front Loading Capability for Vacuum / Cryogenic Probing

Ease of use

  • Intuitive, manual drives
  • Front loading capability through load door
  • Comfortable and easy operation
  • Quick and ergonomic change of DUT

High Measurement Throughput for Vacuum / Cryogenic Probing

High measurement throughput

  • Software control of chuck for fast step-and-repeat testing of the entire wafer
  • Fast step-and-repeat testing of the whole wafer

  • IV/CV
  • MEMS
  • Opto
  • RF/mmW/THz

SourceOne – Certified Pre-Owned Equipment

You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.


SourceOne – Factory Refurbishment Program

Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.


SourceOne – Trade In / Buy Back Program

We'll take your probe station back for a credit note.