Cascade
PLV50
150 mm manual vacuum probe system
PLV50 Overview
Entry-level, manual wafer probing in a vacuum environment
The PLV50 is a highly-precise, cost-effective probe system for wafers and substrates up to 150 mm in a vacuum environment < 1×10-5 mbar. Specially designed for laboratory requirements, it supports a wide range of applications, including DC and RF measurements, MEMS and optoelectronic tests.
PLV50 Key Features
Flexibility
- Different substrate carriers for wafers up to 150 mm or single dies
- Up to six positioners
- Optional thermal chuck (-60°C to 300°C) and pressure regulation
- Probing with an open chamber lid possible under atmospheric condition
- Specially designed for laboratory environments
- Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
Stability
- Probe positioners placed inside vacuum chamber
- Short and stable probe arms
- Solid station frame with built-in vibration-isolation
- Precise probe positioning
- Excellent measurement accuracy and repeatability
- Superior vibration attenuation
Ease of use
- Ergonomic and straightforward design
- Intuitive, manual operation
- Simple microscope operation
- Hinged topside lid
- Comfortable and easy operation
- Quick and ergonomic change of DUT
- Topside access to probes and samples
High measurement throughput
- Independent control of linear chuck stage and positioners
- Contact/separation stroke for probe platen
- Fast, manual step-and-repeat testing of the whole wafer
- Simultaneous contacting and separation of all probes
