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Entry-Level Manual Cryogenic Wafer Probing Below 6 K

The PLC50-dry is a highly precise and cost-effective probe station for wafers and substrates up to 100 mm, operating in a high-vacuum environment. It enables ultra-low temperature measurements below 6 K — without the need for liquid cryogens. Instead, the system relies solely on an integrated cryocooler, offering fully cryogen-free operation.

Engineered to meet the demanding needs of modern laboratories, the PLC50-dry supports a wide range of applications, including DC and RF measurements of advanced silicon, compound semiconductor, and superconductor devices, as well as IR sensors, MEMS and optoelectronic testing like silicon photonics.

Flexibility

  • Different substrate carriers for wafers up to 100 mm or single dies
  • Up to six positioners
  • Use of integrated cryocooler, i.e., offering fully cryogen-free operation
  • Probing with an open chamber lid possible under atmospheric condition
  • Specially designed for laboratory environments
  • Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)

Stability

  • Independently cooled cold shield
  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Ice- and condensation-free probing down to 6 K
  • Precise probe positioning
  • Excellent measurement accuracy and repeatability
  • Superior vibration attenuation

Ease of Use

  • Ergonomic and straightforward design
  • Simple microscope operation
  • Hinged topside lid
  • Comfortable and easy operation
  • Quick and ergonomic change of DUT
  • Topside access to probes and samples

High measurement throughput

  • Independent control of movable probe platen and positioners
  • Fast, manual step-and-repeat testing of the whole wafer
  • Simultaneous contacting and separation of all probes

Cryogenic-free operation

  • Dry cooling system via use of 2-stage Gifford-McMahon cryocooler – enables safe and efficient operation without the need for purchasing, handling, or storing cryogenic liquids

  • IV/CV
  • MEMS
  • Opto
  • RF/mmW/THz