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Probe Systems

Cascade Probe Systems

We offer a complete line of premium performance analytical probe stations for on-wafer probing and board test that help increase process performance while reducing cost of ownership. Our probe systems are available with a complete set of accessories such as microscopes, thermal control systems, software and industry-leading probes.

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    Cascade Probes

    Wafer Test Probes

    We offer more than 50 analytical probe models for wafer, package, and board level characterization. Our families of RF, mixed-signal and DC probes are designed to meet the challenges of a wide range of probing environments.

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      Probe Cards

      Probe Cards

      We offer an extensive portfolio of high-performance probe cards for memory, RF, foundry and logic devices that help lower overall production costs, improve yields and enable “more-than-Moore” advanced packaging technologies.

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        Metrology Systems - FRT Tools

        FRT - a FormFactor company - manufactures powerful surface metrology tools for various sectors such as development production and quality control. Due to the design and construction of these multi-sensor devices, FRT tools can be used for multiple applications.

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          Test Expertise

          FormFactor supports customers throughout the entire design-to-production continuum, from characterization, modeling, reliability, and design de-bug, to qualification and production test.

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            Our customers rely on our proven portfolio of products and our experienced engineers to help them meet today’s test and measurement challenges.

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                Asset 4

                  Pyramid Probe Card Support

                  Pyramid Probe Card Support

                  Find service and support information for your production probe cards such as FAQs, training, and product specific downloads (membrane drawings, design capture forms, user guides, cleaning instructions, and other relevant data.).

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                  Training and Certification

                  Maximize the Performance of Your Pyramid Probe® Card

                  Advances in semiconductor design, as well as the rising expense of bringing new devices to market, have increased the importance of ensuring the longevity of test and measurement tools. Regularly scheduled maintenance and proper cleaning procedures can have a significant impact on extending the life of probe cards, which in turn can improve test throughput and yield. FormFactor offers a variety of training programs, including hands-on training at your location, to help your team optimize probe card performance. Our program is designed to provide Pyramid Probe customers the knowledge and skills required to ensure optimal Pyramid Probe performance and realize maximum useful life in engineering and production test environments.

                  Training and Certification Programs

                  Site Review and Recommendation Report

                  A Site Review consists of inspection and assessment of test floor, equipment and procedures. Best practice recommendations implemented from this review can improve the overall performance and life of the Pyramid Probe card as well as other probing technology.

                  Classroom Training

                  The classroom training will cover handling and maintaining of the Pyramid Probe card. All related documentation will be reviewed so that every attendee fully understands how to optimize probe card life. Classroom training will cover documents for the following:

                  • Pyramid Probe core user guide
                  • Pyramid Probe off-line core cleaning with a brush
                  • Pyramid Probe online cleaning methods
                  • Pyramid Probe new core inspection
                  • Pyramid Probe used core inspection

                  Certification Training: Classroom and Hands-on

                  In addition to classroom training, a hands-on session will take the individuals through the actual installation of the core into the printed circuit board and attendees will practice proper off-line cleaning techniques. A subsequent hands-on audit will be performed to ensure that all individuals understand the proper techniques. A written exam will be given at the end of the course. Upon passing the exam and the hands-on audit, you will receive a Certificate of Completion.

                  Certification Training With Site Review

                  Over the course of two days at your location, FormFactor specialists will provide both Classroom Training and Hands-on Training, concluding with exams for certification. In addition, the training team will assess the operating environment of the probe card and provide recommendations for optimal performance. Our most popular package, the combination of training and site evaluation will assist users in extending the life of the probe card to increase overall cost of ownership. Our comprehensive training and certification program equips you with the best practices and practical techniques to improve overall performance through proper handling of the Pyramid Probe cards.

                  • Optimize the operating environment – reduce contamination and ensure the prober is cleaned on a regular basis to help reduce particle damage risks.
                  • Care and handling – reduce the risk of excessive damage or wear by learning how to properly unpack, mount, remove, and store probe cards.
                  • Inspect and assess – understand potential probe card defects and their impact, and what can be repaired or resolved.
                  • Clean both off-line and online – reduce particles and contamination build-up for sustainable testing and extend probe card life.

                  Ready to get started?

                  Icon Pyramid Probe Card Training Flyer

                  Pyramid Probe Card FAQs

                  Boards FAQ

                  Can I get a custom circuit board with OSSP connectors? Expand

                  In general, custom boards are readily accommodated. Specialized, proprietary, or expensive/hard to find connectors - like the OSSP connectors - must be supplied.

                  You have three choices:

                  • We can build a board to your specifications;
                  • We can mechanically cut and paste a core interface board into a board you supply; or
                  • We can provide you with design specifications on our board-to-core interface so that you can design and build your own board.
                  Where can I get an edge-connector for my 48- or 70-finger Pyramid Probe Card? Expand

                  We recommend the following connectors, available from many electronic component distributors:

                  Manufacturer: EDAC Inc., Ontario, Canada, (416)754-3322

                  48-finger: EDAC Series 305 P/N 305-048-500-202 (CMI Part No. 105-793)
                  70-finger: EDAC Series 342 P/N 342-070-500-202 (CMI Part No. 105-791)

                  The AC lines are routed to "ground signal square pins" on the board. Which ground is this, and is there a specific connector that matches the pins? Expand

                  The square pins referred to are standard 0.100-inch-spacing square-pins commonly used throughout the industry for general-purpose connectors. You may have seen them used with configuration jumpers on older PC cards or motherboards, before all the configuration information went into CMOS.

                  The specifics of the grounding vary somewhat with the probe board configuration. Some configurations have a ground plane; others rely on individual lines connected to ground. In either case, the probe core membrane layout normally has a common ground mesh connecting the solid grounds of all signal lines.

                  I read an article in Microwave & RF that Pyramid Probe cards are mountable on standard positioners. How many positioners are needed? Is an adapter needed? Expand

                  Figure 6 of the January 1997 Microwave & RF article shows an RFC Pyramid Probe using the positioner mount configuration. The Wireless Positioner Mount Pyramid Probe board is very similar, the difference being the high-frequency connections. On the Wireless board, eight SMA connectors are directly mounted to the board and routed to the core using microstrip lines on the board.

                  Two opposing positioners are used, in either E-W or N-S orientation. Since more degrees of freedom are available, setup and use are more complex.

                  Cores FAQ

                  Can I use a single RF line with an isolated ground as a balanced pair? Expand

                  This is not recommended. Our standard method for handling differential/balanced signaling is to provide two independent RF lines (for example RF1+ and RF1-) that are delay matched. Standard delay mismatch is ±10 ps. Custom delay matching of balanced line pairs typically provides delay mismatch of less than ~±1.5 ps.

                  Using independent signal lines for a differential pair does not force the waveform balance of an ideal, balanced transmission line. In practice no such ideally balanced line exists. Standard test system practice (and the method we normally use for Pyramid Probe cards) is to provide two matched independent signal lines and rely on the terminations and signal sources to force signal balance. Ground currents will approximately cancel, providing most of the benefit of differential signaling.

                  The single RF line is an asymmetric transmission line - the signal and separate ground - and will have differing parasitic capacitances loading the signal and ground conductors. This results in distortion of the symmetry of the waveforms and loss of balance. A separate 50-ohm line over a common ground performs better.

                  In our experience, the simplest and most robust solution is to use independent 50-ohm lines right to the IC. Any attempt to transition to a balanced transmission line in the probe causes more harm than good. The differential drive is provided externally by the signal sources or by a balun (balanced transformer).

                  For uncoupled 50-ohm transmission lines, both even and odd mode characteristic impedances are 50 ohms. This means that the differential signal is in an environment equivalent to what it experiences in a balanced transmission line. The coaxial grounds are connected to the common analog ground at the membrane. The balun or test equipment provides the connection at the other ends of the cables. Net ground currents will be equal and opposite for equal and opposite signals, and will cancel.

                  What are the inductances for GP membrane ISS loads? Expand

                  This depends on the orientation of the resistor and probe. Using 150-µm pitch GSG probes we get:

                  R extending away from probe Lterm = -29 pH

                  R returning under probe Lterm = -77 pH

                  R across probe contacts (either) Lterm = -47 pH

                  What is the dielectric constant of the polyimide in PPD cores? Expand

                  The simple answer is 3.5. This is subject to some variation, for reasons described below.

                  Polyimide absorbs water. Published numbers indicate up to 2 or 3% absorption at 100% humidity. Published variations in dielectric constant indicate about a 10% increase in relative dielectric constant at maximum water absorption.

                  Since impedance changes with the square root of dielectric constant, a 10% increase in dielectric constant results in only a little over a 3% change in impedance.

                  BUT, people don't usually test wafers underwater. Within the normal operating environment of a test floor, the humidity variance, hence the impedance variation, is small. So far, not a single customer has observed this to be a problem. In fact, this is why people calibrate. All test instrumentation, cables, sockets, etc., have similar variations with humidity and temperature. (Admittedly though, polyimide may be worse than most others with regard to humidity.)

                  Cores Cleaning FAQ

                  What solvents are approved to use when cleaning the Pyramid Probe core? Expand

                  Use only isopropyl alcohol (2-propanal) CMOS grade, 99.5% (IPA) or methanol CMOS grade when cleaning the Pyramid probes.

                  What solvent is best recommended to use to clean low leakage Pyramid Probe cores? Expand

                  Methanol CMOS grade.

                  Do we recommend using the solvent out of a reservoir? Expand

                  No. We recommend using the solvent out of a solvent squeeze bottle to ensure the use of clean solvent each time.

                  What brush do I use to clean the probe tips on the Pyramid Probe Core? Expand

                  Brushes designed specifically for cleaning probe tips are included with your original shipment. For additional brushes, contact your local applications or sales support.

                  What is the maximum air-nozzle pressure to use on Pyramid Probe cores? Expand

                  Use a maximum of 40 psi (275 kPa).

                  When installing the Pyramid Probe Core into the PCB, is there a specific way the core should be installed? Expand

                  Yes. Please refer to the Pyramid Probe Core User Guide, starting on page 16 for both the Standard (non-P800-S) and P800-S cores.

                  When removing the core from the core box or printed circuit board, should I completely remove the frame screws? Expand

                  Completely removing the frame screws is not necessary. The frame screws are captive and should be loosened and not removed.

                  How should I store the cores? Expand

                  When not installed in a printed circuit board, cores should be stored securely in the core box for mechanical protection. With all precision components, cores should be stored in sealed containers to keep out dust and contaminants, away from excessive heat.

                  What type of online cleaning media do you recommend for the Pyramid Probe Core? Expand

                  We recommend lapping films, abrasive loaded elastomers and coated foams as the cleaning media. Be sure to read our technical brief – Pyramid Probes: Online Cleaning Methods.

                  Does FormFactor offer any training for the Pyramid Probe Core? Expand

                  Yes. We offer a few different options, from Basic Training to complete Certification Training. You can find a complete list of training options on our Probe Card Training and Certification tab.

                  Where do I find design specific recommended overtravels? Expand
                  • See the Data Package tab.
                  • Enter the design specific Part Number and Serial Number
                  • Click “Get Data”
                  • Download the Final Inspect folder to find the Certificate of Conformance

                  Operations FAQ

                  How can I measure probe overtravel on my XYZ-brand probe station? Expand

                  If your probe station doesn't already provide a z-axis position readout, it can be useful to add one. Normally in these cases, the station will provide a platen lift mechanism that allows change between contact and separation positions. Measuring the relative vertical position of the platen after first electrical contact provides good overtravel information.

                  A general-purpose dial test indicator and suitable base providing 0.5-mil resolution or better works well for overtravel measurements. This type of instrument is used in machine shops and may be obtained from many industrial supply companies.

                  One source is MSC Industrial Supply Company (1-800-645-7270), which features a variety to choose from in their catalog's Measuring Instruments: Dial Test Indicators and Accessories section. One configuration we have used is a Brown & Sharpe 599-585 base with a BesTesT dial indicator.

                  How can I set overtravel to optimize the lifetime of Pyramid Probe cores? Expand

                  The most common method is to establish the overtravel required to make good contact, then add 25 to 50 microns of safety margin. Many operations start new cards with as little overtravel as will work, then allow the probe floor to gradually increase overtravel as required to maintain yields, but not exceed a pre-determined maximum. This maximizes card life and minimizes pad damage.

                  VNA Calibrations FAQ

                  Pyramid Probe cards may be calibrated just like any standard microwave probe. Do not expect the highest calibration accuracy, since Pyramid Probe cards are primarily aimed at production and functional test and are less suited to high-performance characterization applications.

                  How do I perform One-Port VNA calibrations with my Pyramid Probe™ cards? Expand

                  For one-port VNA calibrations, use short-open-load calibration coefficients for an equivalent Air Coplanar® (ACP) probe pitch and configuration (ground-signal-ground or ground-signal). Use the impedance standard substrate indicated in the following table:

                  Air Coplanar Probe (ACP) Calibration Coefficients
                  C-Open (fF) GSG
                  L-short (pH)
                  L-Term (pH) GSG ISS P/N Probe Pitch (um) GS/SG ISS P/N C-Open (fF) GS/SG
                  L-short (pH)
                  L-Term (pH)
                  -9.3 2.4 -3.5 101-190 100 103-726 -11.0 33.5 36.5
                  -9.5 3.6 -2.6 101-190 125 103-726 -11.0 41.7 47.2
                  -9.7 4.8 -1.7 101-190 150 103-726 -11.0 49.8 57.8
                  -10.1 7.2 0.2 101-190 200 103-726 -11.0 66.2 79.2
                  -10.5 9.6 2.1 101-190 250 103-726 -11.0 82.5 100.5
                  -15.7 11.0 -25.0 106-682 250 106-683 -7.0 27.0 0.0
                  -13.6 15.8 -21.0 106-682 350 106-683 -7.0 28.2 0.0
                  -12.6 18.2 -19.0 106-682 400 106-683 -7.0 28.8 0.0
                  -10.5 23.0 -15.0 106-682 500 106-683 -7.0 30.0 0.0
                  -9.6 28.1 -3.3 106-682 650 106-683 -6.4 42.9 14.1
                  -9 31.6 4.4 106-682 750 106-683 -6.0 51.6 23.4
                  -7.5 40.4 23.6 106-682 1000 106-683 -5.0 73.4 46.6
                  -6 49.1 42.9 106-682 1250 106-683 -4.0 95.1 69.9

                  Coefficients for VNA calibration depend on the style and pitch of the probe, as well as the ISS used. Calibration coefficients are also suitable for corresponding Pyramid Probe contact configurations.

                  How do I perform Two-Port VNA calibrations with my Pyramid Probe™ cards? Expand

                  Probe cards provide a challenge for two-port calibration. The fixed probe spacing, often with inconveniently oriented ports, makes it difficult to make an ideal thru calibration standard.

                  For two-port calibrations, a thru standard is required. The general-purpose ISS membrane provides a number of different length thrus, allowing connection of two ports. The electrical behavior may not be that of an ideal thru since it may have a right-angle bend, extra loss, or reactive stubs due to excess length. A custom calibration thru consisting of printed lines on membrane material mounted on a flat slide is available. For longer thrus, it is essential to enter the thru loss into the VNA calibration kit.

                  Best results will be obtained for two-port Pyramid Probe calibrations using the SOLR (short-open-load-reciprocal thru) calibration available in Cascade Microtech's WinCal VNA Calibration and Measurement software. The SOLR algorithm is not affected by the non-ideal characteristic of the thru, and only a rough estimate of the thru delay is required.

                  Wafers  FAQ

                  Do the AC signal lines require a signal and ground contact on the wafer or just one pad? Expand

                  It is best to provide ground-signal pairs at the wafer in order to minimize ground inductance at the probe-to-wafer interface. Ground-signal-ground is even better. Ground inductance must be closely watched for the high-speed paths, both for insertion loss and for crosstalk to neighboring lines that might share ground return paths. This is particularly important for characterization measurements such as Vector Network Analyzer (VNA) measurements.

                  Limited frequency ranges may mitigate these issues. In functional testing applications, it is not unusual to see several digital lines share a ground.

                  Some of our pads have a pitch of only X microns. Is this going to pose any problems? Expand

                  Our minimum pad pitch is continually being reduced as our process improves. Of course, wider pitches and pads are easier to probe and are more tolerant to operator errors.

                  See your local FormFactor representative for the latest specifications on minimum pad pitch and other important probe card parameters.

                  How hard are the different metals in contact pads? Expand

                  Published hardness numbers vary considerably, but some average numbers are listed below. Note that pure copper and aluminum are very soft, but a few % alloy kicks them into the 400 range.

                  Metal Hardness
                  Aluminum 100
                  Copper 163
                  Fused quartz 475
                  Nickel 700
                  Silicon 820
                  Rhodium 1200
                  Tungsten 1200

                  Product Data Package

                  Downloads

                  Icon Pyramid Probes - Off-line Core Cleaning With a Brush

                  Icon Online Cleaning Methods for Pyramid Probe Cards

                  Icon RF Probe Card Order Form

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