300 mm semi-/ fully-automated probe system
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300 mm semi-/ fully-automated probe system
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Best-in-class measurement performance at a high level of automation in the lab*
The CM300xi probe station meets the measurement challenges brought on by extremely complex environments, such as unattended testing on small pads over time and at multiple temperatures. Best-in-class measurement performance is achieved for a wide range of applications in an EMI-shielded, light-tight and moisture-free test environment. Thermal management enhancements and lab automation capabilities result in improved yields and faster time to data.
The CM300xi supports Contact Intelligence™ – a unique technology which enables autonomous semiconductor test. A powerful combination of innovative system design and state of the art image processing provides an operator-independent solution to achieve highly-reliable measurement data at any time and temperature.
With the material handling unit, the CM300xi probe station combines fully-automated wafer test with highest accuracy and flexibilty. The system can handle up to fifty 200 or 300 mm wafers provided in SEMI-standard wafer cassettes.
*The CM300 probe station is also available in different versions for measurement tasks that do not need the enhanced feature set as described above. Please refer to the CM300xi Probe System Data Sheet for details and options.
Choose now or upgrade later in the field:
CM300xi with Contact Intelligence™ Technology
Advanced probing technology that learns, senses and reacts to deliver faster time to first data. Align probes precisely onto pads as small as 30 um, compensate easily for a wide temperature range, automate tests for high volume data collection – completely unattended. Contact Intelligence technology will improve efficiency in your lab.
Autonomous DC Measurement Assistant
FormFactor’s Autonomous DC Measurement Assistant enables true hands-free 24/7 wafer probing over temperature and on small pads down to 30 µm. It reduces cost of test and increases throughput by automatically aligning probes-to-pads and managing thermal transition and soak times – without any operator intervention. By dynamically controlling each probe touchdown Auto DC improves test data with optimized contact resistance. Auto DC enables remote operation from home or anywhere in the world.
Autonomous RF Measurement Assistant
FormFactor’s Autonomous RF Measurement Assistant is the only solution in the market that enables true automatic, hands-free calibration and measurement of RF devices at multiple temperatures.
Autonomous RF Calibration and Wafer Probing Over Temperature at High Frequency
Anthony Lord, Director of the RF Market Segment at FormFactor Inc., demonstrates autonomous calibration monitoring and re-calibration over multiple temperatures at frequencies up to 330GHz.
Broadband S-parameter Measurement to 130 GHz | Anthony Lord
FormFactor RF Market Director Anthony Lord reviews the challenges of making very high frequency measurements over a broad band, especially at millimeter waves. He discusses the need for device modelling and circuit characterization with high accuracy and repeatability, as well as the challenges of making these measurements over temperature (-40 to as high as +175 degrees C).
Load-Pull Tuning with FormFactor’s CM300xi and Focus Microwave’s Low Frequency DELTA Tuners
Focus Microwave’s new low frequency DELTA tuners have been seamlessly integrated onto FormFactor’s CM300xi automated wafer probe station. The solution provides high VSWR fundamental and harmonic tuning and covers a wide frequency range of 1.8 to 40 GHz.
Turnkey Solution for Load-Pull Modeling and Characterization of 5G Devices and Transistor Circuits
FormFactor has partnered up with Focus Microwaves and Keysight to provide the most advanced turn-key solution for high-frequency fundamental and harmonic load pull measurements up to 110 GHz.
eVue IV Microscope
The eVue IV digital imaging system combines extraordinary optical performance with increased productivity.