Contact Us
Connect to an Expert

Looking for customer support? Ready to learn more about our products and services?

Contact Sales Today
  • EPS200RF 200 mm Manual Probe System

A complete RF measurement package

The application-focused EPS200RF is a complete solution for best-in-class RF measurements up to 67 GHz. Based on the PM8 system platform, the EPS200RF package includes all the hardware, software and accessories you need to confidently probe RF devices with pads as small as 25 µm x 35 µm.

EPS200 - Three probe technologies

Three Probe Technologies

  • Infinity Probe: best for Al (Si)
  • ACP Probe: best for AU (III-Vs)
  • |Z| Probe: robust solution (long lifetime)
  • Precision contact on a wide variety of materials from 26 GHz to 67 GHz
  • Accurate results with excellent crosstalk
  • Matching cables and substrates included


EPS200RF - Precision probe alignment

Precise Contact Solution

  • RF chuck ±3 μm surface planarity
  • Unique 500 μm platen contact/ separation stroke with ≤± 1 μm accuracy for repeatable contact
  • Precision probe alignment
  • Consistent contact force and overtravel
  • Stable contact performance


WinCal XE - Automated on-wafer RF Measurement Calibration Software

WinCal XE Calibration Software

  • Exclusive 1-, 2-, 3-, and 4-port on-wafer calibration algorithms
  • Automated calibration monitoring
  • Unique measurement & analysis methods
  • Accurate S-parameter measurements
  • Automatic calibration setup for higher efficiency
  • Fast and easy data interpretation and reporting


  • RF/mmW/THz

SourceOne – Certified Pre-Owned Equipment

You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.


SourceOne – Factory Refurbishment Program

Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.


SourceOne – Trade In / Buy Back Program

We'll take your probe station back for a credit note.