Cascade
Summit
200 mm manual/ semi-automated probe system
Summit Overview
Precise On-Wafer Device and Process Characterization
High-precision probe system that enables unattended testing at multiple temperatures. Excellent measurement performance is achieved for a wide range of applications in an EMI-shielded, light-tight and moisture-free test environment, at a temperature range from -60°C to 300°C.
Applications: IV/CV, RF/mmW, Failure Analysis, WLR, MEMSSummit Key Features
High flexibility
- Re-configurable for DC, RF, mmW, FA, WLR and more
- Thermal range: -60˚C to 300˚C available
- Upgrade path to meet your future needs
- Complete solution for small- and large-area multi-site probe cards*
- Stable and repeatable measurements over a wide thermal range
* Semi-auto version only.
Advanced shielding solution
- Moisture-free, light-tight and EMI-shielded test environment with MicroChamber® technology
- Advanced EMI-shielding with PureLine with AttoGuard technologies
- Best solution for low-noise and 1/f measurements
- Minimize AC and spectral noise
- Minimizes settling times for efficient measurements, without compromising accuracy over full thermal range
Ease of use
- Locking roll-out stage
- Innovative microscope remote control
- Intuitive ergonomic stage controls
- Quick, safe, and comfortable wafer access
- Easy on-wafer navigation
- Fast setup and test data gathering
Unattended testing over multiple temperatures*
- VueTrack™ technology
- High-Temperature Stability (HTS) enhancement
- Faster time to data
- Improved yields
* Semi-auto version only.
Productivity*
- eVue™ digital imaging system
- Powerful automation tools
- CellView
- Enhanced optical visualization, fast set-up, and in-die and wafer navigation
- Automatic die-size measurements and wafer alignment
- Enables fast sub-die navigation
* Semi-auto version only.
Velox Probe Station Control Software*
- User-centered design minimizes training costs and enhances efficiency
- Windows 10 compatibility enables highest performance and safe operation with state-of-the-art hardware
- Comprehensive alignment functions – from simple wafer alignment and mapping to advanced probe-to-pad alignment over multiple temperatures for autonomous semiconductor test
- Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
- VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle
*Semi-auto version only.