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  • Summit 200 mm Manual Probe Station

Precise On-Wafer Device and Process Characterization

High-precision probe system that enables unattended testing at multiple temperatures. Excellent measurement performance is achieved for a wide range of applications in an EMI-shielded, light-tight and moisture-free test environment, at a temperature range from -60°C to 300°C.

High Flexible Probe System

High flexibility

  • Re-configurable for DC, RF, mmW, FA, WLR and more
  • Thermal range: -60˚C to 300˚C available
  • Upgrade path to meet your future needs
  • Complete solution for small- and large-area multi-site probe cards*
  • Stable and repeatable measurements over a wide thermal range

* Semi-auto version only.

Advanced Shielding Solution

Advanced shielding solution

  • Moisture-free, light-tight and EMI-shielded test environment with MicroChamber® technology
  • Advanced EMI-shielding with PureLine with AttoGuard technologies
  • Best solution for low-noise and 1/f measurements
  • Minimize AC and spectral noise
  • Minimizes settling times for efficient measurements, without compromising accuracy over full thermal range

Manual 3-axis Stage Probing

Ease of use

  • Locking roll-out stage
  • Innovative microscope remote control
  • Intuitive ergonomic stage controls
  • Quick, safe, and comfortable wafer access
  • Easy on-wafer navigation
  • Fast setup and test data gathering


Summit 200 mm Manual Probe Station

Unattended testing over multiple temperatures*

  • VueTrack™ technology
  • High-Temperature Stability (HTS) enhancement
  • Faster time to data
  • Improved yields

* Semi-auto version only.

Powerful Automation Tools


  • eVue™ digital imaging system
  • Powerful automation tools
  • CellView
  • Enhanced optical visualization, fast set-up, and in-die and wafer navigation
  • Automatic die-size measurements and wafer alignment
  • Enables fast sub-die navigation

* Semi-auto version only.

Velox Probe Station Control Software

Velox Probe Station Control Software*

  • User-centered design minimizes training costs and enhances efficiency
  • Windows 10 compatibility enables highest performance and safe operation with state-of-the-art hardware
  • Comprehensive alignment functions – from simple wafer alignment and mapping to advanced probe-to-pad alignment over multiple temperatures for autonomous semiconductor test
  • Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
  • VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle

*Semi-auto version only.

  • Failure Analysis
  • IV/CV
  • MEMS
  • Reliability
  • RF/mmW/THz


Autonomous DC Measurement Assistant

FormFactor’s Autonomous DC Measurement Assistant enables true hands-free 24/7 wafer probing over temperature and on small pads down to 30 µm. It reduces cost of test and increases throughput by automatically aligning probes-to-pads and managing thermal transition and soak times – without any operator intervention. By dynamically controlling each probe touchdown Auto DC improves test data with optimized contact resistance. Auto DC enables remote operation from home or anywhere in the world.


Autonomous RF Measurement Assistant

FormFactor’s Autonomous RF Measurement Assistant is the only solution in the market that enables true automatic, hands-free calibration and measurement of RF devices at multiple temperatures.


Autonomous RF Calibration and Wafer Probing Over Temperature at High Frequency

Anthony Lord, Director of the RF Market Segment at FormFactor Inc., demonstrates autonomous calibration monitoring and re-calibration over multiple temperatures at frequencies up to 330GHz.


Broadband S-parameter Measurement to 130 GHz | Anthony Lord

FormFactor RF Market Director Anthony Lord reviews the challenges of making very high frequency measurements over a broad band, especially at millimeter waves. He discusses the need for device modelling and circuit characterization with high accuracy and repeatability, as well as the challenges of making these measurements over temperature (-40 to as high as +175 degrees C).


Load-Pull Tuning with FormFactor’s CM300xi and Focus Microwave’s Low Frequency DELTA Tuners

Focus Microwave’s new low frequency DELTA tuners have been seamlessly integrated onto FormFactor’s CM300xi automated wafer probe station. The solution provides high VSWR fundamental and harmonic tuning and covers a wide frequency range of 1.8 to 40 GHz.


Turnkey Solution for Load-Pull Modeling and Characterization of 5G Devices and Transistor Circuits

FormFactor has partnered up with Focus Microwaves and Keysight to provide the most advanced turn-key solution for high-frequency fundamental and harmonic load pull measurements up to 110 GHz.


eVue IV Microscope

The eVue IV digital imaging system combines extraordinary optical performance with increased productivity.


SourceOne – Certified Pre-Owned Equipment

You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.


SourceOne – Factory Refurbishment Program

Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.


SourceOne – Trade In / Buy Back Program

We'll take your probe station back for a credit note.