200 mm Systems
Whatever the application - device characterization, modeling, process development, design de-bug or IC failure analysis, Cascade 200 mm manual and automated wafer probe stations have the precision and versatility needed for the most advanced semiconductor processes and aggressively scaled devices.
The broad use of power semiconductors has created a pressing need to characterize power devices quickly and efficiently. FormFactor offers on-wafer power device characterization systems to reduce time-to-market for new power devices and to keep up with production.
Wafer/Multi-chip Cryogenic Systems
Our high-performance cryogenic probe stations for on-wafer and multi-chip measurements support a wide range of challenging applications, including IR-sensor test, radiometric test, DC and RF measurements at cryogenic temperatures. The systems can handle wafers up to 300 mm, and support cold filter, cold shutter and selectable f/value aperture as well as multiple optical instruments like IR radiation sources (black bodies). Up to eight probe positioners and/or a probe card can be integrated. Automatic chip alignment, OCR and wafer mark reading are exclusive features of our fully- and semi-automated systems. Cooling options include liquid helium (LHe), liquid nitrogen (LN2) or cryogen-free cooling. With a large install base of >80 stations worldwide, we bring expertise and technical know-how to provide the right solution for your measurement challenge.
Our vacuum and pressure probe stations for on-wafer measurements in a high vacuum or controlled pressure environment enable precise µ-bolometer test (un-cooled IR-FPA), MEMS characterization (inertial MEMS, resonators and RF MEMS, pressure sensors), IV/CV, RF/mmW and Opto measurements. Multiple optical instruments like IR radiation sources (black bodies), and up to eight probe positioners and/or a probe card can be integrated. The high stability design provides excellent contact quality and accurate measurement results in a condensation-free test environment. Step and repeat capability enables high throughput with our semi-automated systems.
Custom Probe Systems
Customized solutions for a variety of challenging applications