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A Guide to Full Autonomous Operation Using MLTRL Calibration on and off the Wafer

FormFactor has previously shown the Autonomous RF Measurement assistant using LRRM Calibration. Autonomous RF is used to manage the entire test flow for thermal and ambient testing. This includes the full automated calibration, monitoring to prevent measurement drift, adjustment of probe spacing to account for growth and adjust probing geometries to deal with devices of different layout. In this talk, we will discuss the use of this approach with regard to doing MLTRL calibrations with this approach instead both off and on wafer. We will also show interaction between WinCal, python and analytical approach to evaluate the calibration repeatability.

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