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Fully Automated Integrated Silicon Photonic Wafer Test

Presented at SWTest 2023
Integrated silicon photonics has found extensive use in modern high speed optical links. These optical transceivers are composed of various structures which require extensive passive, DC, RF, and electro-optic characterization at wafer level. A high degree of automation in addition to minimal reconfiguration of the test setup is necessary to improve test throughput. Herein we discuss the use of the CM300 silicon photonics probe station to enable automated full wafer characterization of various passives, DC electro-optic, and VNA measurements of thermal phase shifters, modulators, and photodetectors. FormFactor’s Pharos technology that enables industry proven wafer level automated edge coupling test capability will also be described.

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