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Cascade Probe Systems

Probe systems

We offer a complete line of premium performance analytical probe stations for on-wafer probing and board test that help increase process performance while reducing cost of ownership. Our probe systems are available with a complete set of accessories such as microscopes, thermal control systems, software and industry-leading probes.

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    Cascade Probes

    Probes

    We offer more than 50 analytical probe models for wafer, package, and board level characterization. Our families of RF, mixed-signal and DC probes are designed to meet the challenges of a wide range of probing environments.

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      Probe Cards

      Probe Cards

      We offer an extensive portfolio of high-performance probe cards for memory, RF, foundry and logic devices that help lower overall production costs, improve yields and enable “more-than-Moore” advanced packaging technologies.

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        Metrology

        Metrology Systems

        FRT - a FormFactor company - manufactures powerful surface metrology tools for various sectors such as development production and quality control. Due to the design and construction of these multi-sensor devices, FRT tools can be used for multiple applications.

        Learn More @ FRT

          Test Expertise

          Test Expertise

          FormFactor supports customers throughout the entire design-to-production continuum, from characterization, modeling, reliability, and design de-bug, to qualification and production test.

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            Company

            Probe card manufacturing company

            Our customers rely on our proven portfolio of products and our experienced engineers to help them meet today’s test and measurement challenges.

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              Probe sales

              Quickly find a representative in your area to answer your sales and support questions.

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                • Products
                  • Probe Systems
                    • (Modular Systems)
                    • 150 MM Probe Systems
                      • MPS150
                      • Genius Education Kits
                    • 200 MM Probe Systems
                      • Summit
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                      • PM8/EPS200
                      • See All…
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                  • Probes
                    • ACP
                      • ACP Probe – Coaxial
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                    • INFINITY
                      • Infinity Probe – Coaxial
                      • InfinityXT™ Probe – Coaxial
                      • Infinity Waveguide Probe
                    • |Z| PROBE
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                    • T-WAVE
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                      • DCP-HTR Series Probe
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                    • DC POWER
                      • High Current Probe
                      • High Voltage Probe
                      • Ultra High-Power (UHP)
                    • SPECIALTY
                      • Resistive Matching and Termination
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                Asset 4

                  DC Parametric Test

                  DC-Parametric Test Probe Station

                  Accurate, Repeatable IV/CV Measurements. When Precise Models and Data Matter.

                  The Best Decisions Are Only Made with the Best Data

                  DC parametric measurements are important contributors to decisions made at each stage of semiconductor product development and production, for nearly every device type and semiconductor technology. They play a key role in advanced materials research, process characterization, device characterization and modeling, design debug, process monitoring, and production wafer sort.

                  Accurate and repeatable DC parametric measurements (IV, CV, pulsed, and high-power) reduce uncertainty. Trustworthy results accelerate device qualification and produce more precise models and design toolkits. In turn, these allow designers to deliver more competitive products to market faster.

                  We've revolutionized the analytical probe system for exactly this purpose – to provide an electrically pristine environment for on-wafer measurements. By eliminating environmental factors which can corrupt test results, the prober becomes effectively “invisible” to the measurement instrument. Since the first MicroChamber® probe station in 1991, FormFactor’s Cascade probe system products have always had the same mission – enabling customers to succeed by making the best decisions with the best data.

                  Measurement Integrity Faces Threats from All Directions

                  A myriad of factors can corrupt DC electrical measurements. Electrical noise can appear in the data due to influence from the external environment – e.g., electromagnetic interference and radio frequency interference from cellular networks, radio/TV towers, and nearby electronics and equipment, as well as physical factors like temperature and vibration.

                  Factors internal to the measurement system can also impact results – e.g., current leakage through poorly designed signal paths, resistive or thermal voltage shifts, materials energy storage, and electrical noise from essential probe system components like power supplies, stage motors, thermal systems, and computers.

                  If not properly managed, these factors can substantially degrade electrical performance with data offsets and increased statistical spread across the sample set. And bad data is expensive – time to re-test, extra modeling cycles, delayed product launch, and undervalued/underperforming products.

                  infographic-shielded-wafer-probe-systems
                  MEASUREMENT INTEGRITY INNOVATIONS AND PATENTS
                  1990s MicroChamber®and TopHat
                  AttoGuard®and PureLine™ Technology
                  Low-noise FemtoGuard™ Thermal Chuck
                  Low-noise triax cables
                  2000s Tesla 10kV FemtoGuard
                  HV/HC Kelvin Chuck System
                  MicroVac™ Wafer Contact
                  Thermal noise filtering
                  2010s Contact Intelligence™ Technology
                  High Position Accuracy
                  High Thermal Stability
                  Low-noise eVue IV digital microscope
                  Low-noise Thermal System
                  Flexible Shielded TopHat Feedthrough
                  Optical Stability Shield

                  High Quality Data Doesn’t Happen by Accident

                  FormFactor’s experienced design team has repeatedly raised the performance bar for electrical measurements. Innovation after innovation, carefully developed alongside our valued customers, have resulted in an extensive toolkit of highly effective technologies: EMI/RFI and light shielding, electrical noise filtering, signal guarding, single-point grounding, noise decoupling, contact resistance reduction, capacitance and inductance management, and more. All of these technologies are proven successful across a wide temperature range and in fully automated operation, where challenges rise exponentially.

                  This meticulous attention to electrical measurement integrity is what distinguishes a FormFactor analytical probe system, enabling customer success with data integrity.

                  FormFactor Leads the Industry for Data Integrity

                  Decades of rigorous application, by thousands of customers, have qualified these tools and made FormFactor the world market share leader, by a large margin, in analytical probe systems. Others might claim measurement performance, but FormFactor can prove it. See these technologies first hand at FormFactor’s worldwide demo centers.

                  FormFactor provides the full ecosystem for collecting high-quality, on-wafer electrical measurements – complete solutions with probe stations, chucks, probes, and cables.

                  DCP-HTR low-noise hightemperatureprobes

                  DCP-HTR low-noise high-temperature probes

                  Low-noise FemtoGuard triaxial thermal chuck

                  Low-noise FemtoGuard triaxial thermal chuck

                  Takumi DC-parametric small pitch probe card

                  Takumi DC parametric small pitch probe card

                  Available Today – a Full Suite of Solutions

                  Skilled sales, applications, and design engineers are ready to work with you on your latest measurement challenges. Whether testing a single sample on a manual, room temperature probe station, or managing a high-volume engineering program using fully-automated, multi-temperature tools – FormFactor quickly delivers the data integrity needed for today’s fast-paced and demanding business environment.

                  FormFactor offers a broad, configurable, scalable lineup of high-performance analytical probe stations and analytical probes to meet your performance and price requirements for precision electrical measurements, including:

                  CM300xi - 300 mm Probe System

                  CM300xi - 300 mm Probe System

                  SUMMIT200 Fully-automatic Shielded 200mm Probe System

                  SUMMIT200 - 200 mm Probe System

                  EPS150TRIAX

                  EPS150TRIAX- 150 mm Probe System

                  LEARN MORE

                  PRODUCTS:
                  CM300xi - 300 mm Probe System
                  SUMMIT200 - 200 mm Probe System
                  EPS150TRIAX- 150 mm Probe System
                  Autonomous DC Measurement Assistant

                  DOCUMENTS (PDF):
                  Cascade Probe Systems Brochure
                  CM300xi Data Sheet
                  SUMMIT200 Data Sheet
                  MPS150 Data Sheet

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                  • Products
                    • Probe Systems
                      • (Modular Systems)
                      • 150 MM Probe Systems
                        • MPS150
                        • Genius Education Kits
                        • Back
                      • 200 MM Probe Systems
                        • Summit
                        • BlueRay
                        • PM8/EPS200
                        • See All…
                        • Back
                      • 300 MM Probe Systems
                        • CM300
                        • PM300
                        • See All…
                        • Back
                      • (Dedicated Systems)
                      • AUTONOMOUS ASSISTANTS
                        • Autonomous DC
                        • Autonomous RF
                        • Autonomous SiPh
                        • Back
                      • Board Level Systems
                        • Board Test Systems
                        • Back
                      • Power Systems
                        • Tesla
                        • Back
                      • Advanced Test
                        • Vacuum/Cryo/Pressure Systems
                        • Back
                      • Software
                        • Velox
                        • WinCal XE
                        • Back
                      • Accessories
                        • eVue Microscope
                        • Positioners
                        • Chucks
                        • Vibration Isolation Tables
                        • ShieldEnclosure™
                          •  
                            •  
                            • Back
                          • Back
                        •  
                          •  
                          •  
                          • Back
                        • Back
                      • Additional Products/Programs
                        • Custom Probe Systems
                        • Certified Used Equipment
                        • Trade-in/Buy Back
                        • Educational Savings
                        • Back
                      •  
                      •  
                      • Back
                    • Probes
                      • ACP
                        • ACP Probe – Coaxial
                        • ACP Probe – Cryo/Vacuum
                        • Back
                      • INFINITY
                        • Infinity Probe – Coaxial
                        • InfinityXT™ Probe – Coaxial
                        • Infinity Waveguide Probe
                        • Back
                      • |Z| PROBE
                        • |Z| Probe – Coaxial
                        • |Z| Probe® PCB
                        • |Z| Probe® Power
                        • Back
                      • T-WAVE
                        • T-Wave Probe
                        • Back
                      • RF MULTICONTACT
                        • InfinityQuad
                        • ACP-Q Probe
                        • Unity Probe
                        • Multi-|Z| Probe
                        • |Z| ProbeWedge
                        • QuadCard™
                        • Back
                      • DC PARAMETRIC
                        • DCP 100 Series Probe
                        • DCP-HTR Series Probe
                        • Back
                      • DC MULTICONTACT
                        • DC-Q Probe
                        • Eye-Pass Probe
                        • WPH Probe
                        • Back
                      • DC POWER
                        • High Current Probe
                        • High Voltage Probe
                        • Ultra High-Power (UHP)
                        • Back
                      • SPECIALTY
                        • Resistive Matching and Termination
                        • Light Wave Probe
                        • Back
                      • SIGNAL INTEGRITY
                        • FPC Probe
                        • Back
                      • CALIBRATION TOOLS
                        • Impedance Standard Substrates
                        • CSR Cal Substrates
                        • Multiline TRL Cal Substrates
                        • WinCal XE
                        • Back
                      • Product Support
                        • Probe Support
                        • Probe Repair
                        • WinCal Support
                        • Back
                      • Back
                    • Probe Cards
                      • DRAM
                        • PH Series
                        • SmartMatrix
                        • Back
                      • FLASH
                        • TouchMatrix
                        • Back
                      • FOUNDRY & LOGIC
                        • Altius
                        • Katana
                        • QiLin
                        • Cantilever
                        • Apollo
                        • TrueScale
                        • Vx-MP
                        • Back
                      • PARAMETRIC
                        • Pyramid Parametric
                        • Takumi
                        • Back
                      • RF / MMW / RADAR
                        • Katana-RF
                        • Pyrana
                        • Pyramid Accel Test Fixture
                        • Pyramid-MW
                        • Pyramid RF P-Series
                        • Back
                      • CALIBRATION TOOLS
                        • Pyramid Calibration Substrate
                        • Back
                      • Back
                    • Metrology
                      • Metrology Systems
                        • MicroProf® AP
                        • MicroProf® FS
                        • MicroProf® FE
                        • MicroProf® MHU
                        • MicroProf® TL
                        • MicroProf® 300
                        • MicroProf® 200
                        • MicroProf® 100
                        • Back
                      • Back
                    • Back
                  • Test Expertise
                    • Customer Collaboration
                      • Sharing Expertise
                      • Lab to Fab
                      • Back
                    • Applications
                      • High Bandwith Memory
                      • Silicon Photonics
                      • 5G Devices
                      • DC Parametric Test
                      • Power Semiconductors
                      • Cryogenic Devices
                      • Back
                    • Technologies
                      • Contact Intelligence
                      • Back
                    • Publications
                      • Technical Papers
                      • Case Studies
                      • Back
                    • MeasureOne Solutions
                      • MeasureOne Program Overview
                      • 1/f Device Characterization
                      • Circuit Characterization
                      • Cryogenic / Magnetic Probing
                      • S-Parameter & DC Parametric
                      • Terahertz Probing
                      • Back
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