FRT – a FormFactor company,  designs and delivers cutting edge metrology measurement systems and solutions for a number of different applications. They’ve recently completed some fantastic videos that highlight some of these systems.

The MicroProf® MHU, which is a metrology tool with a material handling unit, created specifically for the semiconductor, MEMS, sapphire and LED industry. Typical applications are measurement of bare and coated wafers, or structured wafers at various lithographic process steps. Due to a robot arm with two vacuum end effectors, the tool has very high throughput rates up to 220 wafers per hour and is capable of processing wafer sizes from 2 to 12 inches.

The MicroProf EFEM AP, FE, FS, DI. The standard fully automated wafer metrology tools – FE, FS, AP and DI – combine the capabilities of the worldwide established MicroProf 300, with a wafer handling system within an Equipment Front End Module (EFEM). With fully SEMI-compliant metrology solutions and long-lasting.

The MicroProf Series 100, 200, and 300. The MicroProf – 3D surface measurement technology for all measurement tasks. With the third generation of multi-sensor surface measuring devices, FRT is at the forefront of the market.

Whether you want to measure the topography, the total thickness or the film thickness of your samples without contact, the versatile MicroProf can be used universally due to the proven optical multi-sensor technology. Various optical measurement methods, which are only available as individual solutions elsewhere, have been combined into a universal, space-saving device.