Now you can view FormFactor’s Gavin Fisher presentation on continuous S-parameter measurements to 500 GHz.  The content was originally presented as a MicroApps workshop at IMS2021.

Increased operation frequency of modern devices is pushing to higher extremes, which results in higher wafer testing frequencies as well. Engineers are being pushed beyond the limits of single sweep broadband coaxial measurements using a single set of probes, into one or more waveguide bands to cover the operating range of the device. Customers often ask us how well measurements correlate between the bands. In his presentation, Gavin shows measurements of the same device type with the same pitch from 200 MHz to 500 GHz, and optimization methods for the measurements and related calibration to achieve one continuous clean result.

The presentation will…

  • Show full band measurements from 200 MHz to 500 GHz is readily achievable on FormFactor platforms with automatic MLTRL calibration and LRRM to 330 GHz
  • Highlight capabilities and compromise areas when N5291A is stretched upward to 130 GHz and WR5.1 minis downwards to 130 GHz
  • Show measurements carried out between one substrate used for calibration and another for measurement
  • Show measurements of a range of standards including offset shorts
  • Test tophat operation and take measurements at 125C
  • Demonstrate data processing capabilities of WinCal XE software and show some approaches to assist probe placement

This presentation was inspired by a 2017 ARFTG paper by Dr. Choon Beng Sia – Minimizing Discontinuities in Wafer-Level Sub-THz Measurements up to 750 GHz for Device Modeling Applications. This paper can be downloaded here.

You can watch the on-demand video presentation from Gavin Fisher here.