In our last blog post, we shared how FormFactor’s Autonomous DC Measurement Assistant represented a big change for engineers and lab managers, delivering a complete hands-free, 24/7 testing solution. The Autonomous DC Measurement Assistant combines motorized probe positioners with state-of-the-art image processing to achieve highly-reliable measurement data at any time. It enables small pad touchdown optimization, automatic testing over multiple different temperatures, and automatic probe layout spacing for testing sub die.

We tackled the first three key features and benefits of the system, which included:

  • Small pad probing down to 30 µm – at multiple temperatures
  • Optimized soak times
  • Optimized contact resistance

Now we’ll continue exploring what makes the Autonomous DC Measurement Assistant unique with the next set of features and benefits:

  • Automated Multi-DUT Layout Testing

Testing multiple devices with different probe layouts in each die location can be very time consuming. Traditionally, a single layout is tested on all dies of the wafer, before setting up the needles for the next probe layout and testing each die again. Testing at different temperatures increases the duration even further due to additional transition, soak and adjustment times. 

Auto DC automates multi-DUT layout testing by changing probe layouts automatically for each die. Multiple devices can be tested automatically in each die location before stepping to the next die. This enhances test flexibility and increases throughput.

  • Industry-Leading High-Performance Probes

The DCP-HTR probe delivers fA-level measurement capability from -65 °C to 300 °C for advanced characterization and reliability testing. Its unique design offers superior guarding and shielding overtemperature, overcoming the high-temperature performance limitations of standard coaxial needles. The optional probe tips with small diameter are ideal for probing pads as small as 30 x 30 μm. 

For advanced accuracy and better vision system recognition, Autonomous DC uses special laser-marked DCP-HTR probe needles.

  • Motorized Positioners

Newly designed programmable positioners have been developed specifically for this application, to give the highest positioning resolution for the most accurate and repeatable probe positioning and measurement performance. With 0.3 µm resolutions even the smallest errors can be recognized and corrected. And with manual controls and encoders the user can set the system up like a manual DC positioner and the system never loses track of the probe location. 

Up to six motorized positioners can be used with the Auto DC Measurement Assistant.

  • VueTrack™ – Simplified Test Management Enables the Ultimate Test Experience

The test sequencing has been vastly simplified, such that each temperature change only requires a simple line of command that will transition the temperature, soak, align the probes and report once ready to test – no operator intervention is required. 

Once ready to test, the test controller software makes the desired measurement and moves to next die. Before contact is made, checks are performed to ensure the probes make precise contact to the pads, and only then the test of the next die is performed. All the thermal transitions, soaks, moving and probing is controlled by Velox Probe Station Control Software and the VueTrack software.

Our next post will cover the remaining three features and benefits of the Auto DC Measurement Assistant – full thermal range in a shielded environment, high-resolution microscope system, and the optional wafer handling unit.

For more detailed information on the Automated DC Measurement Assistant, download the brochure.